Prof. Dr. Henry I. Smith

Current contact address

CountryUnited States of America
CityCambridge
InstitutionMassachusetts Institute of Technology
InstituteDepartment of Electrical Engineering and Computer Science

Profile

Research fieldsQuantum Optics,Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
KeywordsZonenplatten, freitragende Nanostrukturen, Elektronenstrahllithographie, He-Atomstrahlen, Strukturübertragung